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Characterization and optimization of zinc oxide films by r.f. magnetron sputtering

Characterization and optimization of zinc oxide films by r.f. magnetron sputtering

K.B. Sundaram; A. Khan

作者K.B. Sundaram; A. Khan
卷第295卷
印刷ISSN0040-6090
文件大小440.69KB
发表时间1997
DOI10.1016/s0040-6090(96)09274-7
页码87-91

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