Laser direct writing on structured substrates
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Müllenborn, M; Grey, F; Bouwstra, S
- 卷第7卷
- 期第3期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小262.96KB
- 发表时间1997-09-01
- DOI10.1088/0960-1317/7/3/011
- 页码125-127
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