Nitridation impact on thin oxide charge trapping
- 作者M. Alessandri; C. Clementi; B. Crivelli; G. Ghidini; F. Pellizzer; F. Martin; M. Imai; H. Ikegawa
- 卷第36卷
- 印刷ISSN0167-9317
- 文件大小267.24KB
- 发表时间1997
- DOI10.1016/s0167-9317(97)00050-6
- 页码211-214
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