Interfacial reactions and electrical characteristics in Ti/SiGe/Si(100) contact systems
- 作者J. Kojima; S. Zaima; H. Shinoda; H. Iwano; H. Ikeda; Y. Yasuda
- 印刷ISSN0169-4332
- 文件大小371.91KB
- 发表时间1997
- DOI10.1016/s0169-4332(97)80101-8
- 页码317-320
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