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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A novel electrostatic servo capacitive vacuum sensor

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A novel electrostatic servo capacitive vacuum sensor

Yuelin Wang, ; Esashi, M.

作者Yuelin Wang, ; Esashi, M.
卷第2卷
文件大小387.86KB
发表时间1997
DOI10.1109/SENSOR.1997.635739
页码1457-1460

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