[IEEE Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (1997.01.26-1997.01.30)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 - Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots

• 文件大小921.83KB
• 发表时间1997
• DOI10.1109/memsys.1997.581778