The effect of thermal treatment on the structure, optical and electrical properties of amorphous titanium nitride thin films
- 作者Adam Tarniowy; Ryszard Mania; Mieczyslaw Rekas
- 卷第311卷
- 印刷ISSN0040-6090
- 文件大小1234.10KB
- 发表时间1997
- DOI10.1016/s0040-6090(97)00714-1
- 页码93-100