A metrological scanning force microscope used for coating thickness and other topographical measurements

• 作者Bienias, M.; Gao, S.; Hasche, K.; Seemann, R.; Thiele, K.
• 卷第66卷
• 印刷ISSN0947-8396
• 电子ISSN1432-0630
• 文件大小783.36KB
• 发表时间1998-03
• DOI10.1007/s003390051252