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Extensive thermal characterization of advanced resists by Modulated Temperature DSC (MT-DSC): Application to acrylate based 193 nm resists

Extensive thermal characterization of advanced resists by Modulated Temperature DSC (MT-DSC): Application to acrylate based 193 nm resists

P.J. Paniez; J-A. Guinot; B. Mortini; C. Rosilio

作者P.J. Paniez; J-A. Guinot; B. Mortini; C. Rosilio
印刷ISSN0167-9317
文件大小287.44KB
发表时间1998
DOI10.1016/s0167-9317(98)00085-9
页码367-370

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