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Handbook of Physical Vapor Deposition (PVD) Processing || Ion Plating and Ion Beam Assisted Deposition

Handbook of Physical Vapor Deposition (PVD) Processing || Ion Plating and Ion Beam Assisted Deposition

Mattox, Donald M.

作者Mattox, Donald M.
文件大小203.07KB
发表时间1998
DOI10.1016/B978-081551422-0.50009-7
页码426-471

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