[IEEE ASDAM '98. Conference Proceedings. Second International Conference on Advances Semiconductor Devices and Microsystems - Smolenice Castle, Slovakia (5-7 Oct. 1998)] ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) - Development of a micromanipulation system for special applications in handling of microcomponents

• 作者Petrovic, D.; Chatzitheodoridis, E.; Popovic, G.; Haddad, G.; Brenner, W.; Vujanic, A.
• 文件大小736.03KB
• 发表时间1998
• DOI10.1109/asdam.1998.730225
• 页码319-322