[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - /sup 1/H NMR studies of PECVD a-SiN/sub X/:H
He Yihua, ; Weng Limin, ; Xu Chunfang, ; Yang Guang, ; Wu Xuewen,
- 作者He Yihua, ; Weng Limin, ; Xu Chunfang, ; Yang Guang, ; Wu Xuewen,
- 文件大小143.75KB
- 发表时间1998
- DOI10.1109/icsict.1998.785881
- 页码304-306