[IEEE 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 - Novosibirsk, Russia (1998.9.23-1998.9.26)] 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) - Chemisorption getter pump
- 作者Monakhov, V.N.; Popov, V.F.; Krasilnikova, V.P.
- 文件大小166.82KB
- 发表时间1998
- DOI10.1109/apeie.1998.768908
- 页码55-56
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