[IEEE 1998 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (9-11 June 1998)] 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216) - A statistical gate CD control including OPC
Misaka, A.; Goda, A.; Odanaka, S.; Kobayashi, S.; Watanabe, H.
- 作者Misaka, A.; Goda, A.; Odanaka, S.; Kobayashi, S.; Watanabe, H.
- 文件大小319.35KB
- 发表时间1998
- DOI10.1109/vlsit.1998.689244
- 页码170-171