Development of vacuum arc ion sources for heavy ion accelerator injectors and ion implantation technology (invited)
- 期刊名称Review of Scientific Instruments
- 作者Oks, Efim M.
- 卷第69卷
- 期第2期
- 印刷ISSN0034-6748
- 文件大小520.25KB
- 发表时间1998
- DOI10.1063/1.1148533
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