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Real time spectroscopic ellipsometry characterization of structural and thermal equilibration of amorphous silicon–carbon alloy p layers in p-i-n solar cell fabrication

Real time spectroscopic ellipsometry characterization of structural and thermal equilibration of amorphous silicon–carbon alloy p layers in p-i-n solar cell fabrication

Fujiwara, H.; Koh, Joohyun; Lee, Yeeheng; Wronski, C. R.; Collins, R. W.

期刊名称Journal of Applied Physics
作者Fujiwara, H.; Koh, Joohyun; Lee, Yeeheng; Wronski, C. R.; Collins, R. W.
卷第84卷
期第4期
印刷ISSN0021-8979
文件大小445.43KB
发表时间1998
DOI10.1063/1.368361

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