Growth and Characterisation of Thick SiC Epilayers by High Temperature CVD

Ellison, Alexsandre; Kimoto, Tsunenobu; Ivanov, I.G.; Wahab, Qamar-ul; Henry, Anne; Kordina, Olle; Zhang, Jian Hui; Hemmingsson, C.; Gu, Chun-Yuan; Leys, M.R.; Janzén, Erik

期刊名称Materials Science Forum
作者Ellison, Alexsandre; Kimoto, Tsunenobu; Ivanov, I.G.; Wahab, Qamar-ul; Henry, Anne; Kordina, Olle; Zhang, Jian Hui; Hemmingsson, C.; Gu, Chun-Yuan; Leys, M.R.; Janzén, Erik
电子ISSN1662-9752
文件大小361.94KB
发表时间1998
DOI10.4028/www.scientific.net/MSF.264-268.103
页码103-106

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Growth and Characterisation of Thick SiC Epilayers by High Temperature CVD