![[IEEE 2011 International Semiconductor Device Research Symposium (ISDRS) - College Park, MD, USA (2011.12.7-2011.12.9)] 2011 International Semiconductor Device Research Symposium (ISDRS) - Room temperature Plasma Assisted Atomic Layer Deposition Al<inf>2</inf>O<inf>3</inf> film's encapsulation application in Organic Light Emitting Diodes]()
[IEEE 2011 International Semiconductor Device Research Symposium (ISDRS) - College Park, MD, USA (2011.12.7-2011.12.9)] 2011 International Semiconductor Device Research Symposium (ISDRS) - Room temperature Plasma Assisted Atomic Layer Deposition Al<inf>2</inf>O<inf>3</inf> film's encapsulation application in Organic Light Emitting DiodesFu, Richard; Chen, Andrew; Srour, Merric; Blomquist, Steven; Forsythe, Eric; Shi, Jianmin; Morton, David · 2011