Real-time monitoring of steady-state pulsed chemical beam epitaxy by p-polarized reflectance
K.J. Bachmann; N. Sukidi; C. Höpfner; C. Harris; N. Dietz; H.T. Tran; S. Beeler; K. Ito; H.T. Banks
- 作者K.J. Bachmann; N. Sukidi; C. Höpfner; C. Harris; N. Dietz; H.T. Tran; S. Beeler; K. Ito; H.T. Banks
- 卷第183卷
- 期第3期
- 印刷ISSN0022-0248
- 文件大小843.29KB
- 发表时间1998
- DOI10.1016/s0022-0248(97)00410-7
- 页码323-337