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Formation of polysilane film by laser CVD

Formation of polysilane film by laser CVD

Akira Watanabe; Takashi Kawato; Minoru Matsuda; Mamoru Fujitsuka; Osamu Ito

作者Akira Watanabe; Takashi Kawato; Minoru Matsuda; Mamoru Fujitsuka; Osamu Ito
卷第312卷
印刷ISSN0040-6090
文件大小649.33KB
发表时间1998
DOI10.1016/s0040-6090(97)00718-9
页码123-129

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