Poly(chloro-p-xylylene)/SiO2 multilayer thin films deposited near-room temperature by thermal CVD
Jay J. Senkevich; Seshu B. Desu
- 作者Jay J. Senkevich; Seshu B. Desu
- 卷第322卷
- 印刷ISSN0040-6090
- 文件大小326.84KB
- 发表时间1998
- DOI10.1016/s0040-6090(97)00918-8
- 页码148-157