An electroformed CMOS integrated angular rate sensor

S. Chang; M. Chia; P. Castillo-Borelley; W. Higdon; Q. Jiang; J. Johnson; L. Obedier; M. Putty; Q. Shi; D. Sparks; S. Zarabadi

作者S. Chang; M. Chia; P. Castillo-Borelley; W. Higdon; Q. Jiang; J. Johnson; L. Obedier; M. Putty; Q. Shi; D. Sparks; S. Zarabadi
卷第66卷
印刷ISSN0924-4247
文件大小650.77KB
发表时间1998
DOI10.1016/s0924-4247(97)01761-5
页码138-143

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