Measurement of the residual stresses in the thin film by using reflection of the laser light beam (In Japanese: English Abstract) : Shimizu, K.; Sugimura, H.; Takahashi, S. Journal of JSNDI, Vol. 40, No. 11, pp. 742–747 (Nov. 1991)

• 卷第31卷
• 期第2期
• 印刷ISSN0963-8695
• 文件大小145.64KB
• 发表时间1998
• DOI10.1016/s0963-8695(98)90499-6