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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Multiple species implants with pulsed and DC plasma immersion ion implantation

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Multiple species implants with pulsed and DC plasma immersion ion implantation

Linder, B.P.; En, W.G.; Cheung, N.W.

作者Linder, B.P.; En, W.G.; Cheung, N.W.
卷第2卷
文件大小515.82KB
发表时间1998
DOI10.1109/iit.1998.813894
页码1179-1182

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