SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Integrated mixed-technology design environment to support micro-electro-mechanical systems development
Karam, Jean Michel; Courtois, Bernard; Cao, Ariel D.; Hofmann, K.; French, Patrick J.; Chau, Kevin H.
- 作者Karam, Jean Michel; Courtois, Bernard; Cao, Ariel D.; Hofmann, K.; French, Patrick J.; Chau, Kevin H.
- 卷第3514卷
- 印刷ISSN0277-786X
- 文件大小2607.10KB
- 发表时间1998
- DOI10.1117/12.323899
- 页码278-286