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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - <title>Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets</title>

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets

Ohta, Akihiro; Bhansali, Shekhar; Kishimoto, Isao; Umeda, Akira; Friedrich, Craig R.; Vladimirsky, Yuli
  • 作者Ohta, Akihiro; Bhansali, Shekhar; Kishimoto, Isao; Umeda, Akira; Friedrich, Craig R.; Vladimirsky, Yuli
  • 卷第3512卷
  • 印刷ISSN0277-786X
  • 文件大小426.36KB
  • 发表时间1998
  • DOI10.1117/12.324049
  • 页码138-145
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