Study of Silicon Melt Convection during the RF-FZ Crystal Growth Process.
- 期刊名称Transactions of the Japan Society of Mechanical Engineers Series B
- 作者MUNAKATA, Tetsuo; TANASAWA, Ichiro
- 卷第64卷
- 期第621期
- 印刷ISSN0387-5016
- 电子ISSN1884-8346
- 文件大小898.74KB
- 发表时间1998
- DOI10.1299/kikaib.64.1478
- 页码1478-1485
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