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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - AC electromigration (10 MHz–1 GHz) in Al metallization

[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - AC electromigration (10 MHz–1 GHz) in Al metallization

Rodbell, K. P.; Castellano, A. J.; Kaufman, R. I.

作者Rodbell, K. P.; Castellano, A. J.; Kaufman, R. I.
文件大小601.91KB
发表时间1998
DOI10.1063/1.54683
页码212-223

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