Surface Evolution During Semiconductor Processing
Rajagopalan, Ganesh; Mahadev, Vadali; Cale, Timothy S.
- 期刊名称VLSI Design
- 作者Rajagopalan, Ganesh; Mahadev, Vadali; Cale, Timothy S.
- 卷第6卷
- 印刷ISSN1065-514X
- 电子ISSN1563-5171
- 文件大小1984.93KB
- 发表时间1998
- DOI10.1155/1998/62125
- 页码379-384