[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Electromigration behavior of borderless vias
- 作者Kakuhara, Yumi; Chikaki, Shin-ichi
- 文件大小785.38KB
- 发表时间1998
- DOI10.1063/1.54677
- 页码89-94
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