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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Barrier layer formation on

[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Barrier layer formation on

Sekiguchi, Mitsuru; Ueda, Satoshi; Tamaki, Tokuhiko; Mayumi, Shuichi

作者Sekiguchi, Mitsuru; Ueda, Satoshi; Tamaki, Tokuhiko; Mayumi, Shuichi
文件大小635.24KB
发表时间1998
DOI10.1063/1.54669
页码469-474

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