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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization -

[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization -

Maex, Karen; De Wolf, Ingrid; Howard, Dave; Steegen, An; Lauwers, Anne

作者Maex, Karen; De Wolf, Ingrid; Howard, Dave; Steegen, An; Lauwers, Anne
文件大小1232.07KB
发表时间1998
DOI10.1063/1.54685
页码427-438

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