Characterization of the silicon nitride–thermal oxide interface in oxide–nitride–oxide structures by ELS, XPS, ellipsometry, and numerical simulation
- 作者V.A. Gritsenko; S.N. Svitasheva; I.P. Petrenko; Yu.N. Novikov; Yu.N. Morokov; Hei Wong; R.W.M. Kwok; R.W.M. Chan
- 卷第38卷
- 期第5期
- 印刷ISSN0026-2714
- 文件大小329.75KB
- 发表时间1998
- DOI10.1016/s0026-2714(98)00019-5
- 页码745-751
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