Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

• 作者Stephan Hausmann; Lothar Bischoff; Matthias Voelskow; Jochen Teichert; Wolfhard Möller; Henning Fuhrmann
• 卷第148卷
• 印刷ISSN0168-583X
• 文件大小407.52KB
• 发表时间1999
• DOI10.1016/s0168-583x(98)00786-1
• 页码610-614