XRR and XPS studies of SiO2 thin films formed by r.f. magnetron sputtering
Kojima, Isao; Li, Boquan; Fujimoto, Toshiyuki
- 期刊名称Surface and Interface Analysis
- 作者Kojima, Isao; Li, Boquan; Fujimoto, Toshiyuki
- 卷第28卷
- 期第1期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小135.77KB
- 发表时间1999-08
- DOI10.1002/(sici)1096-9918(199908)28:1<267::aid-sia591>3.0.co;2-o
- 页码267-270