Experimental studies of O
2
/Ar plasma in a planar inductive discharge
Gudmundsson, J T; Kimura, Takashi; Lieberman, M A
- 期刊名称Plasma Sources Science and Technology
- 作者Gudmundsson, J T; Kimura, Takashi; Lieberman, M A
- 卷第8卷
- 期第1期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小187.20KB
- 发表时间1999-02-01
- DOI10.1088/0963-0252/8/1/003
- 页码22-30