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Distribution of metal impurities in silicon wafers using imaging-mode multi-elemental laser-induced breakdown spectrometry

Distribution of metal impurities in silicon wafers using imaging-mode multi-elemental laser-induced breakdown spectrometry

Romero, Dolores; Romero, J. Manuel Fern�ndez; Romero, J. Javier

期刊名称Journal of Analytical Atomic Spectrometry
作者Romero, Dolores; Romero, J. Manuel Fern�ndez; Romero, J. Javier
卷第14卷
期第2期
印刷ISSN0267-9477
电子ISSN1364-5544
文件大小444.86KB
发表时间1999
DOI10.1039/A807362G
页码199-204

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