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[IEEE IEEE 1999 International Interconnect Technology Conference - San Francisco, CA, USA (24-26 May 1999)] Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) - Fluorine effects on silicidation of BF/sub 2//sup +/-implanted narrow poly lines

[IEEE IEEE 1999 International Interconnect Technology Conference - San Francisco, CA, USA (24-26 May 1999)] Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) - Fluorine effects on silicidation of BF/sub 2//sup +/-implanted narrow poly lines

Yap, C.W.; Soh-Yun Siah, ; Lim, E.H.; Lee, T.K.; Gn, F.H.

作者Yap, C.W.; Soh-Yun Siah, ; Lim, E.H.; Lee, T.K.; Gn, F.H.
文件大小279.87KB
发表时间1999
DOI10.1109/iitc.1999.787071
页码38-40

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