Dynamics of Mass Transfer on a Wafer Surface in Ozonated-Water Processing for Photoresist Removal
Narayanswami, Natraj; Nelson, S.
- 期刊名称Solid State Phenomena
- 作者Narayanswami, Natraj; Nelson, S.
- 电子ISSN1662-9779
- 文件大小275.53KB
- 发表时间1999
- DOI10.4028/www.scientific.net/SSP.65-66.157
- 页码157-160