High quality GaN film growth on AlN buffer layer, pretreated with alternating pulsative supply of TMG and NH3

• 作者Jin Soo Hwang; Satoru Tanaka; Sohachi Iwai; Yoshinobu Aoyagi; Seeyearl Seong
• 卷第200卷
• 印刷ISSN0022-0248
• 文件大小332.35KB
• 发表时间1999
• DOI10.1016/s0022-0248(98)00893-8
• 页码63-69