Thermodynamic study on the role of hydrogen during the MOVPE growth of group III nitrides

• 作者Akinori Koukitu; Tetsuya Taki; Naoyuki Takahashi; Hisashi Seki
• 卷第197卷
• 印刷ISSN0022-0248
• 文件大小284.04KB
• 发表时间1999
• DOI10.1016/s0022-0248(98)00894-x
• 页码99-105