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Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique

Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique

Nakamura, Masayuki; Nakayama, Hirotaka; Ito, Masafumi; Hori, Masaru; Goto, Toshio; Kono, Akihiro; Ishii, Nobuo

期刊名称Japanese Journal of Applied Physics
作者Nakamura, Masayuki; Nakayama, Hirotaka; Ito, Masafumi; Hori, Masaru; Goto, Toshio; Kono, Akihiro; Ishii, Nobuo
卷第38卷
印刷ISSN0021-4922
文件大小692.70KB
发表时间1999-12-1
DOI10.1143/JJAP.38.L1469

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