Fractures properties of InP microcantilevers by hetero-micromachining
K Fricke; E Peiner; M Chahoud; A Schlachetzki
- 作者K Fricke; E Peiner; M Chahoud; A Schlachetzki
- 卷第76卷
- 印刷ISSN0924-4247
- 文件大小1444.83KB
- 发表时间1999
- DOI10.1016/s0924-4247(99)00038-2
- 页码395-402