Hardness and Elastic Modulus Measurements of AIN and TiN Sub-Micron Thin Films Using the Continuous Stiffness Measurement Technique with Fem Analysis
Rawdanowicz, T. A.; Sankar, J.; Narayan, J.; Godbole, V.
- 期刊名称MRS Proceedings
- 作者Rawdanowicz, T. A.; Sankar, J.; Narayan, J.; Godbole, V.
- 卷第594卷
- 电子ISSN1946-4274
- 文件大小898.69KB
- 发表时间1999-1
- DOI10.1557/proc-594-507