SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Education in Microelectronics and MEMS - Collaborative design software for MEMS
Tay, Francis E.; Payne, Fred; Parameswaran, M.
- 作者Tay, Francis E.; Payne, Fred; Parameswaran, M.
- 卷第3894卷
- 印刷ISSN0277-786X
- 文件大小1291.51KB
- 发表时间1999
- DOI10.1117/12.364514
- 页码152-158