SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Excimer laser micromachining of structures using SU-8
Ghantasala, Muralihar K.; Harvey, Erol C.; Sood, Dinesh K.; Smith, James H.; Karam, Jean Michel
- 作者Ghantasala, Muralihar K.; Harvey, Erol C.; Sood, Dinesh K.; Smith, James H.; Karam, Jean Michel
- 卷第3874卷
- 印刷ISSN0277-786X
- 文件大小624.82KB
- 发表时间1999
- DOI10.1117/12.361208
- 页码85-91