SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Microfabrication of biofactory-on-a-chip devices using laser ablation technology
Talary, Mark S.; Courtois, Bernard; Crary, Selden B.; Burt, Julian P.; Rizvi, Nadeem H.; Ehrfeld, Wolfgang; Fujita, Hiroyuki; Rumsby, Phil T.; Pethig, Ron; Karam, Jean Michel; Markus, Karen W.
- 作者Talary, Mark S.; Courtois, Bernard; Crary, Selden B.; Burt, Julian P.; Rizvi, Nadeem H.; Ehrfeld, Wolfgang; Fujita, Hiroyuki; Rumsby, Phil T.; Pethig, Ron; Karam, Jean Michel; Markus, Karen W.
- 卷第3680卷
- 印刷ISSN0277-786X
- 文件大小1911.80KB
- 发表时间1999
- DOI10.1117/12.341248