CVD Process Simulation for TiN, Mo Film Growth Rate Distributions
- 期刊名称Materials Transactions, JIM
- 作者Yoshikawa, Noboru; Kikuchi, Atsushi; Taniguchi, Shoji
- 卷第40卷
- 期第11期
- 印刷ISSN0916-1821
- 电子ISSN2432-471X
- 文件大小1210.38KB
- 发表时间1999
- DOI10.2320/matertrans1989.40.1323
- 页码1323-1330
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