XANES and XPS characterization of hard amorphous CSixNy thin films grown by RF nitrogen plasma assisted pulsed laser deposition

T. Thärigen; D. Mayer; R. Hesse; P. Streubel; D. Lorenz; P. Grau; M. Lorenz; R. Szargan

作者T. Thärigen; D. Mayer; R. Hesse; P. Streubel; D. Lorenz; P. Grau; M. Lorenz; R. Szargan
卷第365卷
印刷ISSN0937-0633
电子ISSN1432-1130
文件大小105.81KB
发表时间1999-09
DOI10.1007/s002160051481
页码244-248

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