ChemInform Abstract: Controlled Growth of TaN, Ta3N5, and TaOxNy Thin Films by Atomic Layer Deposition.
- 作者Mikko Ritala; Pia Kalsi; Diana Riihelae; Kaupo Kukli; Markku Leskelae; Janne Jokinen
- 卷第30卷
- 期第38期
- 印刷ISSN0931-7597
- 电子ISSN1522-2667
- 文件大小31.08KB
- 发表时间1999
- DOI10.1002/chin.199938034
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